| 講演抄録／キーワード |
| 講演名 |
Ku帯RF-MEMSを用いた小型LTCC移相器の試作
○山根大輔（東大）・山下清隆・清田春信（京大）・年吉 洋（東大）・川崎繁男（JAXA） エレソ技報アーカイブはこちら |
| 抄録 |
（和） |
For realization of a small and cost-effective phase shifter, combination of a Low Temperature Co-fired Ceramics (LTCC) technology with a RF-MEMS technology is applicable. In this paper, the line- switched-type phase shifter with a 3D LTCC transmission line for downsizing by stacking several circuit-layers and a novel design of RF-MEMS switch for having low-insertion loss and high isolation characteristics was demonstrated. The design method and fabrication process were reported with experimental results. The insertion loss and phase error of the 4-bit digital phase shifter with the LTCC delay-line circuit with the size of 8mm x 8mm x 0.55mm was measured to be around 0.5 dB/bit and less than 5 % at 12.5GHz, respectively and the RF-MEMS Dual Single-Pole-Double-Throw (D-SPDT) switch showed insertion loss of 0.9dB, return loss of 12dB and isolation of 29dB at 12.5GHz under the driving voltage of less than 40V. |
| （英） |
For realization of a small and cost-effective phase shifter, combination of a Low Temperature Co-fired Ceramics (LTCC) technology with a RF-MEMS technology is applicable. In this paper, the line- switched-type phase shifter with a 3D LTCC transmission line for downsizing by stacking several circuit-layers and a novel design of RF-MEMS switch for having low-insertion loss and high isolation characteristics was demonstrated. The design method and fabrication process were reported with experimental results. The insertion loss and phase error of the 4-bit digital phase shifter with the LTCC delay-line circuit with the size of 8mm x 8mm x 0.55mm was measured to be around 0.5 dB/bit and less than 5 % at 12.5GHz, respectively and the RF-MEMS Dual Single-Pole-Double-Throw (D-SPDT) switch showed insertion loss of 0.9dB, return loss of 12dB and isolation of 29dB at 12.5GHz under the driving voltage of less than 40V. |
| キーワード |
（和） |
移相器 / ＬＴＣＣ / ＲＦ－ＭＥＭＳスイッチ / Ｋｕ帯 / / / / |
| （英） |
phase shifter / LTCC / RF-MEMS switch / Ku-band / / / / |
| 文献情報 |
信学技報 |
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