Thu, Nov 7 PM 13:30 - 16:40 |
(1) |
13:30-13:55 |
Development of Methods for Early Detection of Plant Growth Disorder by Hyper/Multispectral Camera under Artificial Light |
Koji Kashima, Shiho Torashima, Hiroyuki Ito, Katsuro Fukozu, Takayuki Ohba (Tokyo Tech) |
(2) |
13:55-14:20 |
Thermal deposition of antimony sulfide thin films |
Yasushi Takano, Sho Inoue (Shizuoka Univ.) |
(3) |
14:20-14:45 |
Study on Cu orientation control on ultra-thin TaWN film |
Mayumi B. Takeyama, Masaru Sato (Kitami Inst. of Technol.) |
|
14:45-15:00 |
Break ( 15 min. ) |
(4) |
15:00-15:25 |
Annealing effects on the properties of nitrogen doped DLC films |
Hiroya Osanai, Kazuki Nakamura, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki (Hirosaki Univ.), Maki Suemitsu (Tohoku Univ.), Hideki Nakazawa (Hirosaki Univ.) |
(5) |
15:25-15:50 |
Nitrogen doping to ZnO films in a catalytic reaction assisted chemical vapor deposition |
Ryuta Iba, Hiroki Kambayashi, Yuki Adachi (NUT), Koichiro Oishi, Hironori Katagiri (NITNC), Kanji Yasui (NUT) |
(6) |
15:50-16:40 |
[Invited Talk]
Metal-oxide film growth by catalytic-reaction assisted chemical vapor deposition |
Kanji Yasui (Nagaoka Univ. Technol.) |
Fri, Nov 8 AM 10:00 - 11:40 |
(7) |
10:00-10:25 |
Characterization of ZrNx films deposited at room temperature by RF sputtering |
Masaru Sato, Mayumi B. Takeyama (Kitami Inst. of Technol.) |
(8) |
10:25-10:50 |
Change in Electrical Characteristics with Change of Channel Structure in Integrated FET Using Piezoelectric Film P (VDF-TrFE) as Gate Insulator |
Shusaku Matsumoto, Takuya Okayama, Akio Furukawa (Tokyo Univ. of Science) |
(9) |
10:50-11:40 |
[Invited Talk]
Mapping of metal/semiconductor and semiconductor/semiconductor interfaces using scanning internal photoemission microscopy |
Kenji Shiojima (Univ. of Fukui) |