Thu, Oct 21 AM 10:00 - 16:50 |
|
10:00-10:40 |
( 40 min. ) |
|
10:40-10:45 |
Break ( 5 min. ) |
(1) |
10:45-11:35 |
[Invited Talk]
Influence of Fluorine on Reliabilities of SiO2 and SixNy Films |
Yuichiro Mitani (Tokyo City Univ.) |
(2) |
11:35-12:00 |
Characterization of Gallium Oxide Thin Film Deposited by Sputtering Method |
Fuminobu Imaizumi (NIT, Oyama college) |
|
12:00-13:00 |
Lunch Break ( 60 min. ) |
(3) |
13:00-13:25 |
A study on Ar/N2-plasma sputtering gas pressure dependence on the LaBxNy insulator formation for non-volatile memory applications |
Eun-Ki Hong, Shun-ichiro Ohmi (Tokyo Tech.) |
(4) |
13:25-13:50 |
A study on the effect of inter layers on ferroelectric nondoped HfO2 formation |
Masakazu Tanuma, Joong-Won Shin, Shun-ichiro Ohmi (Tokyo Tech.) |
(5) |
13:50-14:15 |
A study on Hf-based MONOS nonvolatile memory with HfO2 and HfON tunneling layers for multi-bit/cell operation |
Pyo Jooyoung, Ihara Akio, Ohmi Shun-ichiro (Tokyo Tech.) |
|
14:15-14:30 |
Break ( 15 min. ) |
(6) |
14:30-15:20 |
[Invited Talk]
Device and Integration Technologies Realizing Silicon Quantum Computers |
Takahiro Mori (AIST) |
(7) |
15:20-15:45 |
Highly sensitive TMR sensor and its application to bio-magnetic field measurement |
Mikihiko Oogane (Tohoku Univ.) |
|
15:45-16:00 |
Break ( 15 min. ) |
(8) |
16:00-16:25 |
Current Measurement Platform Applied for Statistical Measurement of Discharge Current due to Traps in SiN Dielectrics |
Koga Saito, Hayato Suzuki, Hyeonwoo Park, Rihito Kuroda (Tohoku Univ.), Akinobu Teramoto (Hiroshima Univ.), Tomoyuki Suwa, Shigetoshi Sugawa (Tohoku Univ.) |
(9) |
16:25-16:50 |
Statistical analysis of RTN behavior on transistor structure, operating region, and carrier transport direction |
Ryo Akimoto, Rihito Kuroda, Takezo Mawaki, Shigotoshi Sugawa (Tohoku Univ.) |
|
16:50-17:30 |
( 40 min. ) |