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Technical Committee on Silicon Device and Materials (SDM)
Chair: Hiroshige Hirano (TowerPartners Semiconductor) Vice Chair: Shunichiro Ohmi (Tokyo Inst. of Tech.)
Secretary: Takahiro Mori (AIST), Nobuaki Kobayashi (Nihon Univ.)
Assistant: Taiji Noda (Panasonic), Tomoyuki Suwa (Tohoku Univ.)
DATE:
Thu, Jan 28, 2021 13:05 - 17:05
PLACE:
TOPICS:
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Thu, Jan 28 PM (13:00 - 17:05)
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----- Opening Address ( 5 min. ) -----
(1) 13:05 - 13:35
[Invited Talk]
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Reika Ichihara (Kioxia)
(2) 13:35 - 14:05
[Invited Talk]
Diamond Semiconductor Devices, state-of-the-art of material growth and device processing
Hitoshi Umezawa (AIST)
(3) 14:05 - 14:35
[Invited Talk]
Secure 3D CMOS Chip Stacks with Backside Buried Metal Power Delivery Networks for Distributed Decoupling Capacitance
Kazuki Monta (Kobe Univ.)
----- Break ( 30 min. ) -----
(4) 15:05 - 15:35
[Invited Talk]
Vertical Gate-All-Around Tunnel FETs Using InGaAs Nanowire/Si with Core-Multishell Structure
Katsuhiro Tomioka, Hironori Gamo, Junichi Motohisa, Takashi Fukui (Hokkaido Univ.)
(5) 15:35 - 16:05
[Invited Talk]
Evaluation of Defects in Si Substrates Introduced by Stochastic Lateral Straggling during Plasma Exposure and Its Impact on Ultra-low Leakage Devices
Yoshihiro Sato, Takayoshi Yamada, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami (Panasonic), Keiichiro Urabe, Koji Eriguchi (Kyoto Univ.)
(6) 16:05 - 16:35
[Invited Talk]
Subband Engineering by Combination of Channel Thickness Scaling and (111) Surface Orientation in InAs-On-Insulator nMOSFETs
Kei Sumita, Kasidit Toprasertpong, Mitsuru Takenaka, Shinich Takagi (Univ.of Tokyo)
(7) 16:35 - 17:05
# Information for speakers
Invited Talk will have 25 minutes for presentation and 5 minutes for discussion.
# CONFERENCE SPONSORS:
- This conference is co-sponsored by The Japan Society of Applied Physics.
=== Technical Committee on Silicon Device and Materials (SDM) ===
# FUTURE SCHEDULE:
Fri, Feb 5, 2021: Online
Fri, Apr 23, 2021 - Sat, Apr 24, 2021: Okinawaken Seinen Kaikan [Fri, Feb 12], Topics: Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc.
# SECRETARY:
SDM Secretary: MORI Takahiro(National Institute of AIST)
Tel +81-29-849-1149
E-Mail -aist
Last modified: 2021-01-04 11:50:24
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