★電子デバイス研究会(ED)
専門委員長 橋詰 保 (北大) 副委員長 加地 徹 (豊田中研)
幹事 村田 浩一 (NTT), 原 直紀 (富士通研)
幹事補佐 津田 邦男 (東芝), 須原 理彦 (首都大東京)
★シリコン材料・デバイス研究会(SDM)
専門委員長 渡辺 重佳 (湘南工科大)
副委員長 杉井 寿博 (富士通マイクロエレクトロニクス)
幹事 安斎 久浩 (ソニー), 遠藤 哲郎 (東北大)
幹事補佐 大西 克典 (九工大)
日時 2009年 6月24日(水) 13:00~18:00
2009年 6月25日(木) 08:30~13:30
2009年 6月26日(金) 08:30~13:00
会場 海雲台グランドホテル(韓国、釜山)(651-2 Woo-Dong, Haeundae-Gu, Busan 612-020, Korea.釜山空港からリムジンバスで1時間(20分おき, 7:10-21:40).http://www.grandhotel.co.kr/japanese/default.aspx)
議題 第17回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2009)
6月24日(水) 午後 Plenary session (Room Jungwon) (13:00~13:50)
(1) 13:00 - 13:10
Opening Remark
(2) 13:10 - 13:50
[Keynote] A perspective on silicon industry : challenges and opportunities
S. Y. Choi (Samsung Electronics)
−−− 休憩 ( 10分 ) −−−
6月24日(水) 午後 Session 1A Power Devices & Circuits (Room Jungwon) (14:00~18:00)
(3) 14:00 - 14:30
[招待講演]CMOS-based Power Amplifiers Operating at Quasi-Millimeter and Millimeter Waveband
○Toshihide Suzuki・Yoichi Kawano(Fujitsu/Fujitsu Labs.)・Masaru Sato(Fujitsu Labs.)・Yasuhiro Nakasha・Tatsuya Hirose(Fujitsu/Fujitsu Labs.)・Naoki Hara(Fujitsu Labs.)・Kazukiyo Joshin(Fujitsu/Fujitsu Labs.)
(4) 14:30 - 15:00
[招待講演]Advanced magnetic tunnel junctions for hybrid spintronics/CMOS circuits
○Shoji Ikeda(Tohoku Univ.)・Jun Hayakawa(Hitachi, Ltd.)・Huadong Gan・Kotaro Mizumuma・Ji Ho Park(Tohoku Univ.)・Hiroyuki Yamamoto・Katsuya Miura(Hitachi, Ltd./Tohoku Univ.)・Haruhiro Hasegawa・Ryutaro Sasaki・Toshiyasu Meguro(Tohoku Univ.)・Kenchi Ito(Hitachi, Ltd.)・Fumihiro Matsukura・Hideo Ohno(Tohoku Univ.)
(5) 15:00 - 15:15
Transient characteristic of fabricated Magnetic Tunnel Junction (MTJ) programmed with CMOS circuit
○Masashi Kamiyanagi・Fumitaka Iga・Shoji Ikeda(Tohoku Univ.)・Katsuya Miura(Tohoku Univ./Hitachi)・Jun Hayakawa(Hitachi)・Haruhiro Hasegawa・Takahiro Hanyu・Hideo Ohno・Tetsuo Endoh(Tohoku Univ.)
(6) 15:15 - 15:30
Study of the DC Performance of Fabricated Magnetic Tunnel Junction Integrated on Back-end Metal Line of CMOS Circuits
○Fumitaka Iga・Masashi Kamiyanagi・Shoji Ikeda(Tohoku Univ.)・Katsuya Miura(Tohoku Univ./Hitachi)・Jun Hayakawa(Hitachi)・Haruhiro Hasegawa・Takahiro Hanyu・Hideo Ohno・Tetsuo Endoh(Tohoku Univ.)
−−− 休憩 ( 30分 ) −−−
(7) 16:00 - 16:15
Analysis on the Behavior of a Low Voltage Triggered SCR ESD Clamp Circuit in Comparison between the Standard Transmission Line Pulse System and the Very Fast Transmission Line Pulse System.
○Jae-Young Park・Jong-Kyu Song・Dae-Woo Kim・Chang-Soo Jang・Won-Young Jung・Taek-Soo Kim(Dongbu HiTek)
(8) 16:15 - 16:30
Current Controlled MOS Current Mode Logic with Auto-detection of Threshold Voltage Fluctuation
○Tetsuo Endoh・Hyoungjun Na(Tohoku Univ.)
(9) 16:30 - 16:45
A V-band Injection-Locked Frequency Divider with Low Supply Voltage in 0.13-um Si RFCMOS Technology
○Seung-Woo Seo・Jae-Sung Rieh(Korea Univ.)
(10) 16:45 - 17:00
A Statistical Analysis of Distributions of RTS Characteristics by Wide-Range Sampling Frequencies
○Kenichi Abe・Takafumi Fujisawa・Akinobu Teramoto・Syunichi Watabe・Shigetoshi Sugawa・Tadahiro Ohmi(Tohoku Univ.)
(11) 17:00 - 17:15
A 0.18um CMOS over 10 Gb/s 10-PAM Serial Link Receiver
○Jeongjun Lee・Jikyung Jeong・Jinwook Burm(Sogang University)
(12) 17:15 - 17:30
A CMOS 12.8 Gb/s 10-PAM transmitter for chip-to-chip communication
○Jikyung Jeong・Jeongjun Lee・Jinwook Burm(Sogang University)
(13) 17:30 - 17:45
Fundamental study of a composite right/left-handed transmission line with self-multiplexed properties toward functional wireless interconnects
○Sadaharu Ito・Michihiko Suhara(Tokyo Metro Univ.)
(14) 17:45 - 18:00
Fabrication of copper pillar tin bump (CPTB) for high density chip interconnect technology
O. C. Chung, J. M. Lee, J. K. Kim, S. J. Hong, I. W. Cho (Myongji Univ.)
6月24日(水) 午後 Session 1B Emerging Devices I (Room Namwon) (14:00~18:00)
(15) 14:00 - 14:30
[招待講演]Metrology of microscopic properties of graphene on SiC
○Masao Nagase・Hiroki Hibino・Hiroyuki Kageshima・Hiroshi Yamaguchi(NTT BRL)
(16) 14:30 - 15:00
[招待講演]Theoretical study on graphene field-effect transistors
○Eiichi Sano(Hokkaido Univ./JST)・Taiichi Otsuji(Tohoku Univ../JST)
(17) 15:00 - 15:30
[招待講演]
A nanotube and nanowire integrated sensor array for the detection of multiple hazardous gases
J. W. Lee*, K. Y. Dong*, Y. M. Park*, K. S. Lee*, J. Choi*, J. H. Lee*, H. H. Choi**, S. D.
Kim***, E. K. Kim†, B. K. Ju* (*Korea Univ., **Yonsei Univ., ***KETI, †Seoul National Univ. of Technology)
−−− 休憩 ( 30分 ) −−−
(18) 16:00 - 16:15
Characteristics of organic field-effect-transistor with high dielectric constant layer
○S. Lee・Y. J. Choi・J. Park・K. Y. Ko・I.. S. Park・J. Ahn(Hanyang Univ.)
(19) 16:15 - 16:30
Electrical characteristics of OFETs with thin gate dielectric
○Young-uk Song・Shun-ichiro Ohmi・Hiroshi Ishiwara(Tokyo Inst. of Tech.)
(20) 16:30 - 16:45
Design of 30nm FinFET with Halo Structure
○Tetsuo Endoh・Koji Sakui・Yukio Yasuda(Tohoku Univ../JST-CREST)
(21) 16:45 - 17:00
Design and Simulation of Self-Aligned Vertical Island Single Electron Transistor (VI-SET) with Electrical Tunneling Barrier.
○Joung-eob Lee・Kwon-Chil Kang・Jung-Han Lee・Byung-Gook Park(Seoul National Univ.)
(22) 17:00 - 17:15
Simulation and Experiment of Liquid-Phase Microjoining Using Cone-Shaped Compliant Bump
○Lijing Qiu(Kyushu Univ.)・Naoya Watanabe(Fukuoka-IST)・Tanemasa Asano(Kyushu Univ.)
(23) 17:15 - 17:30
A new Combination of RSD and Inside Spacer Thin Film Transistor
○M. J. Chang・T. C. Li・F. T. Chien(Feng Chia Univ.)・C. N. Liao・Y. T. Tsai(National Central Univ.)
(24) 17:30 - 17:45
Gate-all-around tunnel field-effect transistor (GAA TFET) with vertical channel and n-doped layer
D. S. Lee, H. S. Yang, K. C. Kang, J. E. Lee, J. H. Lee, B. G. Park (Seoul National Univ.)
(25) 17:45 - 18:00
A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor
○Jin Kwan Kim(KAIST)・Keedong Yang(i3system Conp.)・Yong Soo Lee(KAIST)・Hee Chul Lee(KAIST/National Nanofab Center)
6月25日(木) 午前 Session 2A Compound Semiconductor Devices (Room Jungwon) (08:30~13:30)
(26) 08:30 - 09:00
[招待講演]Electron Devices Based on GaN and Related Nitride Semiconductors
○Masaaki Kuzuhara(Univ. of Fukui)
(27) 09:00 - 09:30
[招待講演]InAlGaN/AlGaN/GaN Heterosturcures Field Effect Transistors with Flat Surface and High Electron Mobility
○Masanobu Hiroki・Narihiko Maeda・Takashi Kobayashi・Naoteru Shigekawa(NTT PH Labs.)
(28) 09:30 - 10:00
[招待講演]InGaAs/InP MISFET with epitaxially grown source
○Yasuyuki Miyamoto・Toru Kanazawa・Hisashi Saito・Kazuhito Furuya(Tokyo Inst. of Tech.)
(29) 10:00 - 10:30
[招待講演]
Effect of contact resistance on the performance of a-IGZO thin film transistors
S. Y. Lee (KIST)
−−− 休憩 ( 15分 ) −−−
(30) 10:45 - 11:00
4H-SiC Avalanche Photodiodes for 280 nm UV Detection.
○B. R. Park・H. Sung・Chun-Hyung Cho(Hongik Univ.)・P. M. Sandvik(GE)・Ho-Young Cha(Hongik Univ.)
(31) 11:00 - 11:15
Interface characterization of Al2O3/n-GaN structure prepared by atomic layer deposition
○Kimihito Ooyama(Hokkaido Univ/Sumitomo Metal Mining)・Chihoko Mizue・Yujin Hori・Tamotsu Hashizume(Hokkaido Univ.)
(32) 11:15 - 11:30
InP Gunn diodes with shallow-barrier Schottky contacts.
○M. R. Kim・J. K. Rhee・S. D. Lee・Y. S. Chae・S. K. Sharma・A. Kathalingam・C. W. Lee・H. J. Lim(Dongguk Univ.)・J. H. Choi・W. J. Kim(Agency for Defense Development)
(33) 11:30 - 11:45
Formation and application of InP porous structures on p-n substrates
○Taketomo Sato・Naoki Yoshizawa・Hiroyuki Okazaki・Tamotsu Hashizume(Hokkaido Univ.)
(34) 11:45 - 12:00
A New Bottom-Gated Polysilicon Thin Film Transistors with Polysilicon spacer
○Y. J. Chen・T. C. Li・F. T. Chien(Feng Chia Univ.)・C. N. Liao・Y. T. Tsai(National Central Univ.)
(35) 12:00 - 12:15
Stochastic Resonance in GaAs-based Nanowire Field-Effect Transistors and Their Summing Network
○Seiya Kasai(Hokkaido Univ./PRESTO JST)・Tetsuya Asai・Yuta Shiratori・Daisuke Nakata(Hokkaido Univ.)
(36) 12:15 - 12:30
Estimation of collector current spreading in InGaAs SHBT having 75-nm-thick collector
○Yasuyuki Miyamoto・Shinnosuke Takahashi・Takashi Kobayashi・Hiroyuki Suzuki・Kazuhito Furuya(Tokyo Inst. of Tech.)
(37) 12:30 - 12:45
Study of a PMD tolerance extension by InP HBT analog EDC IC without adaptive control in 43G DQPSK transmission
○Toshihiro Itoh・Kimikazu Sano・Hiroyuki Fukuyama・Koichi Murata(NTT)
(38) 12:45 - 13:00
Characteristics of GaN p-n diodes fabricated on a free-standing GaN substrate
T. Uesugi*, N. Soejima*, T. Kachi*, T. Hashizume** (*Toyota Central R&D Labs, **Hokkaido
Univ.)
(39) 13:00 - 13:15
Synthesis of small diameter silicon nanowires on SiO2 and Si3N4 surfaces
○J. H. Ahn(Korea University)・J. H. Lee・T. W. Koo(Sungkyunkwan Univ/Korea University)・M. G. Kang(Korea University)・D. M. Whang(Sungkyunkwan Univ/Korea University)・S. W. Hwang(Korea University)
(40) 13:15 - 13:30
Effect of Ion-Beam-Induced Damage on Luminescence Properties in Tb-Implanted AlxGa1-xN
○Ji-Ho Park・Hiroshi Okada・Akihiro Wakahara・Yuzo Furukawa(Toyohashi Univ. of Tech.)・Yong-Tae Kim(Dankook Univ.)・Jonghan Song(KIST)・Ho-Jung Chang(Dankook Univ.)・Shin-ichiro Sato・Takeshi Ohshima(JAEA, Takasaki)
6月25日(木) 午前 Session 2B Silicon & Bio-Devices (Room Namwon) (09:00~13:15)
(41) 09:00 - 09:30
[招待講演]Novel-Functional Single-Electron Devices Using Silicon Nanodot Array
○Yasuo Takahashi・Takuya Kaizawa・Mingyu Jo・Masashi Arita(Hokkaido Univ.)・Akira Fujiwar・Yukinori Ono(NTT)・Hiroshi Inokawa(Shizuoka Univ.)・Jung-Bum Choi(Chungbuk National Univ.)
(42) 09:30 - 10:00
[招待講演]MOS Transistors fabricated on Si(551) surface based on radical reaction processes
○Akinobu Teramoto・Weitao Cheng・Chingfoa Tye・Shigetoshi Sugawa・Tadahiro Ohmi(Tohoku Univ.)
(43) 10:00 - 10:30
[招待講演]
Dielectrophoresis based cell separation technique for high throughput, purity
J. Y. Park (Sogang Univ.)
−−− 休憩 ( 15分 ) −−−
(44) 10:45 - 11:15
[招待講演]
Transport through DNA molecules and possible applications to future devices
J. S. Hwang*, D. Ahn**, S. W. Hwang* (*Korea Univ., **Univ. of Seoul)
(45) 11:15 - 11:45
[招待講演]
MEMS for bio-medical applications in Malaysia
B. Y. Majlis (Univ. Kebangsaan Malaysia)
(46) 11:45 - 12:00
Effective Annealing for Si film
○Takashi Noguchi・Tomoyuki Miyahira・Yeh Chen・Jean de dieu Mugiraneza(Univ. of Ryukyus)
(47) 12:00 - 12:15
Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy
○Tomoyuki Suwa(Tohoku Univ.)・Takashi Aratani(Shin-Etsu Chemical)・Masaaki Higuchi(TOSHIBA)・Sigetoshi Sugawa(Tohoku Univ.)・Eiji Ikenaga(JASRI)・Jiro Ushio(Hitachi)・Hiroshi Nohira(Musashi Inst. of Tech.)・Akinobu Teramoto・Tadahiro Ohmi・Takeo Hattori(Tohoku Univ.)
(48) 12:15 - 12:30
Electrical Detection of Silicon Binding Protein-Protein A Using a p-MOSFET Sensor
○Hideki Murakami・Syed Mahboob・Kiyotaka Katayama・Katsunori Makihara・Mitsuhisa Ikeda・Yumehiro Hata・Akio Kuroda・Seiichiro Higashi・Seiichi Miyazaki(Hiroshima Univ.)
(49) 12:30 - 12:45
Strain effects in van der Pauw (VDP) stress sensor fabricated on (111) silicon in electronic packages
○C. H. Cho・H. Y. Cha(Hongik Univ.)
(50) 12:45 - 13:00
Study on Quantum Electro-Dynamics in Vertical MOSFET
○Masakazu Muraguchi・Tetsuo Endoh(Tohoku Univ./JST-CREST)
(51) 13:00 - 13:15
Sub-10 nm Multi-Nano-Pillar Type Vertical MOSFET
○Tetsuo Endoh・Koji Sakui・Yukio Yasuda(Tohoku Univ./JST-CREST)
6月26日(金) 午前 Session 3A Emerging Devices II (Room Jungwon) (08:30~12:15)
(52) 08:30 - 09:00
[招待講演]
Solution-processed transparent conductive film and its applications
Y. T. Hong, M. K. Kwon, P. K. Nayak, J. H. Yang (Seoul National Univ.)
(53) 09:00 - 09:30
[招待講演]Lateral liquid-phase epitaxy of Ge on insulator using Si seed for ultrahigh speed transistor
○Taizoh Sadoh・Takanori Tanaka・Yasuharu Ohta・Kaoru Toko・Masanobu Miyao(Kyushu Univ.)
(54) 09:30 - 10:00
[招待講演]
Si:Ge alloy nanowire optoelectronics
C. J. Kim, H. S. Lee, K. B. Kang, M. H. Cho (Postech)
(55) 10:00 - 10:30
[招待講演]
Overview of technology progress in advanced gate stack for CMOS application and its
reliability issues
R. Choi (Inha Univ.)
−−− 休憩 ( 15分 ) −−−
(56) 10:45 - 11:15
[招待講演]
Physical understanding of temperature dependent band gap energies in InAs nanostructures
O. S. Kopylov*†, M. H. Abdellatif†, J. D. Song†, W. J. Choi†, N. K. Cho†, J. I. Lee† (*National
Technical Univ. of Ukraine, †KIST)
(57) 11:15 - 11:30
Random Telegraph Signals in Two-Dimensional Array of Si Quantum Dots
○Katsunori Makihara・Mitsuhisa Ikeda・Akira Kawanami・Seiichi Miyazaki(Hiroshima Univ.)
(58) 11:30 - 11:45
Fabrication of Silicon nanowire FET using transfer technology
○W. H. Kim(Korea Electronics Technology Institute)
(59) 11:45 - 12:00
Importance of the Eelectronic State on the Electrode in Electron Tunneling Processes between the Electrode and the Quantum Dot
○Masakazu Muraguchi(Tohoku Univ.)・Yukihiro Takada・Shintaro Nomura(Univ. of Tsukuba.)・Tetsuo Endoh(Tohoku Univ.)・Kenji Shiraishi(Univ. of Tsukuba.)
(60) 12:00 - 12:15
Fabrication of double-dot single-electron transistor in silicon nanowire
○Mingyu Jo・Takuya Kaizawa・Masashi Arita(Hokkaido Univ.)・Akira Fujiwara・Yukinori Ono(NTT)・Hiroshi Inokawa(Shizuoka Univ.)・Jung-Bum Choi(Chungbuk National Univ.)・Yasuo Takahashi(Hokkaido Univ.)
6月26日(金) 午前 Session 3B Memory Devices(Room Namwon) (09:00~12:00)
(61) 09:00 - 09:30
[招待講演]
SONOS-type flash memory with thin HfO2 as trapping layer using atomic layer deposition
J. S. Oh*, K. I. Choi*, D. H. Nam*, Y. S. Kim*, M. H. Kang*, M. H. Song*, S. K. Lim*, D. E.
Yoo*, S. S. Park*, J. S. Kim**, Y. C. Park**, H. D. Lee*, G. W. Lee* (*Chungnam National Univ.,
**National Nanofab Center)
(62) 09:30 - 10:00
[招待講演]Future High Density Memory with Vertical Structured Device Technology
○Tetsuo Endoh(Tohoku Univ.)
(63) 10:00 - 10:15
Multi-level reading method by using PCI(Paierd Cell Interference) in vertical NAND flash memory.
○Yoon Kim・Seongjae Cho・Jang-Gn Yun・Il Han Park・Gil Sung Lee・Doo-Hyun Kim・Dong Hua Li・Se Hwan Park・Wandong Kim・Wonbo Shim・Byung-Gook Park(Seoul National Univ.)
(64) 10:15 - 10:30
Architecture and verification of the row chain cell array for polymer random access memory
○Jung ha Kim・Chang yong Ahn・Sang sun Lee(Hanyang Univ.)
−−− 休憩 ( 30分 ) −−−
(65) 11:00 - 11:15
Enhancement of the programming speed in SANOS nonvolatile memory device designed utilizing Al2O3 and SiO2 stacked tunneling layers.
○H. W. Kim・D. H. Kim・J. H. You・T. W. Kim(Hanyang Univ.)
(66) 11:15 - 11:30
Novel Capacitorless DRAM Cell for Low Voltage Operation and Long Data Retention Time
○Woojun Lee・Woo Young Choi(Sogang Univ.)
(67) 11:30 - 11:45
Multilevel dual-channel NAND flash memories with high read and program verifying speeds utilizing asymmetrically-doped channel regions
○J. W. Lee・J. H. You・S. H. Jang・K. D. Kwack・T. W. Kim(Hanyang Univ.)
(68) 11:45 - 12:00
Study on Dependence of Self-Boosting Channel Potential on Device Scale and Doping Concentration in 2-D and 3-D NAND-Type Flash Memory Device.
○Seongjae Cho・Jung Hoon Lee・Yun Kim・Jang-Gn Yun・Hyungcheol Shin・Byung-Gook Park(Seoul National Univ.)
6月26日(金) 午後 Closing Session (12:30~13:00)
(69) 12:30 - 13:00
Closing Remark
☆ED研究会今後の予定 [ ]内発表申込締切日
7月30日(木)~31日(金) 大阪大学(銀杏会館) [5月23日(土)] テーマ:センサーデバイス,MEMS,一般
【問合先】
村田 浩一(NTT)
TEL:046-240-2871、FAX:046-270-2872
E-mail: aecl
原 直紀 (富士通研究所)
TEL : 046-250-8242、FAX : 046-250-8168
E-mail : o
津田 邦男(東芝)
TEL : 044-549-2142、FAX : 044-520-1501
E-mail : oba
☆SDM研究会今後の予定 [ ]内発表申込締切日
7月16日(木)~17日(金) 東工大 大岡山キャンパス 国際交流会館 [5月13日(水)] テーマ:低電圧/低消費電力技術、新デバイス・回路とその応用
【問合先】
川中繁 (東芝)
TEL 045-776-5670, FAX 045-776-4104
E-mail geba
Last modified: 2009-09-07 13:38:16
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