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| Chair |
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Yasuo Nara |
| Vice Chair |
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Yuzou Oono (Univ. of Tsukuba) |
| Secretary |
|
Yoshitaka Sasago (Hitachi) |
| Assistant |
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Rihito Kuroda (Tohoku Univ.) |
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| Conference Date |
Fri, Feb 28, 2014 09:25 - 16:25 |
| Topics |
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| Conference Place |
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| Sponsors |
This conference is co-sponsored by The Japan Society of Applied Physics.
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Copyright
and
reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Fri, Feb 28 AM
09:25 - 16:25 |
| |
09:25-09:30 |
Opening Address ( 5 min. ) |
| (1) |
09:30-10:10 |
[Invited Talk]
Large-Radius Neutral Beam Enhanced Chemical Vapor Deposition Process for Non-Porous Ultra-low-k SiOCH  SDM2013-165 |
Yoshiyuki Kikuchi (Tokyo Electron/Tohoku Univ.), Seiji Samukawa (Tohoku Univ.) |
| (2) |
10:10-10:40 |
[Invited Talk]
Trend of practical technology in advanced low-k integration SDM2013-166 |
Naoya Inoue (Renesas Electronics Corp.) |
| |
10:40-11:00 |
Break ( 20 min. ) |
| (3) |
11:00-11:30 |
[Invited Talk]
Impact of Back Grind Damage on Si Wafer Thinning for 3D Integration SDM2013-167 |
Yoriko Mizushima (Fujitsu Lab./Tokyo Inst. of Tech.), Youngsuk Kim (Tokyo Inst. of Tech./Disco), Tomoji Nakamura (Fujitsu Lab.), Ryuichi Sugie, Hideki Hashimoto (Toray Research Center), Akira Uedono (Univ. of Tsukuba), Takayuki Ohba (Tokyo Inst. of Tech.) |
| (4) |
11:30-12:00 |
[Invited Talk]
Injection technique of organic-base conductive ink toward fast formation of TSV SDM2013-168 |
Jin Kawakita (National Institute for Materials Science) |
| |
12:00-13:00 |
Lunch Break ( 60 min. ) |
| (5) |
13:00-13:50 |
[Keynote Address]
Integrated Circuits in Future
-- How do we find opportunity and challenge of integrated circuits? -- SDM2013-169 |
Kazuya Masu (Tokyo Inst. of Tech.) |
| (6) |
13:50-14:20 |
[Invited Talk]
Novel Implantation Process of Carbon Nanotubes for Plugs and Vias, and their Integration with Transferred Multilayer Graphene Wire Obtained by Annealing Sputtered Amorphous Carbon SDM2013-170 |
Motonobu Sato, Makoto Takahashi, Mizuhisa Nihei, Shintaro Sato, Naoki Yokoyama (AIST) |
| |
14:20-14:40 |
Break ( 20 min. ) |
| (7) |
14:40-15:20 |
[Invited Talk]
Low temperature growth of dense carbon nanotube arrays on conductive underlayers SDM2013-171 |
Suguru Noda (Waseda Univ.), Nuri Na (Waseda Univ./Univ. of Tokyo), Takashi Shirai, Keisuke Nomura (Univ. of Tokyo), Kei Hasegawa (Waseda Univ.) |
| (8) |
15:20-15:50 |
[Invited Talk]
TSV Liner Formation with Vapor Deposited Polyimides SDM2013-172 |
Takafumi Fukushima, Mariappan Murugesan, Jicheol Bea, Kangwook Lee, Mitsumasa Koyanagi (Tohoku Univ.) |
| (9) |
15:50-16:20 |
[Invited Talk]
15μm-pitch Bump Interconnections Relied on Flip-chip Bonding Technique
-- for Advanced Chip Stacking Applications -- SDM2013-173 |
Masahiro Aoyagi, Thanh-Tung Bui, Fumiki Kato, Naoya Watanabe, Shunsuke Nemoto, Katsuya Kikuchi (AIST) |
| |
16:20-16:25 |
Closing Address ( 5 min. ) |
| Announcement for Speakers |
| Keynote Address | Each speech will have 40 minutes for presentation and 10 minutes for discussion. |
| Invited Talk | Each speech will have 30 minutes for presentation and 10 minutes for discussion. |
| Invited Talk | Each speech will have 20 minutes for presentation and 10 minutes for discussion. |
| Contact Address and Latest Schedule Information |
| SDM |
Technical Committee on Silicon Device and Materials (SDM) [Latest Schedule]
|
| Contact Address |
Yukinori Ono(NTT)
Tel 046-240-2641 Fax 046-240-4317
E- : o         |
Last modified: 2013-12-16 08:25:13
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