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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, ICD, ITE-IST [detail] 2018-08-07
13:40		 Hokkaido Hokkaido Univ., Graduate School of IST M Bldg., M151 [Invited Talk] Fabrication and Characterization of SOI-CMOS Using Minimal-Fab and Mega-Fab Hybrid Process
Yongxun Liu, Hiroyuki Tanaka (AIST), Kazuhiro Koga, Kazushige Sato (MINIMAL), Sommawan Khumpuang, Masayoshi Nagao, Takashi Matsukawa, Shiro Hara (AIST) SDM2018-30 ICD2018-17		 In this work, gate-last and gate-first SOI-CMOS integrated circuits have been successfully fabricated on the minimal waf... [more] SDM2018-30 ICD2018-17
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