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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2015-08-10
13:40
Aomori   Effects of substrate bias on properties of nitrogen-doped DLC films prepared by radio frequency plasma-enhanced chemical vapor deposition
Masato Tsuchiya, Kazuki Murakami, Tatsuhito Satou, Takahiro Takami, Yoshiharu Enta, Hideki Nakazawa (Hirosaki Univ.) CPM2015-32
We have deposited nitrogen-doped diamond-like carbon (N-DLC) films by RF plasma-enhanced chemical vapor deposition using... [more] CPM2015-32
pp.7-10
CPM 2014-09-04
13:30
Yamagata The 100th Anniversary Hall, Yamagata University Characterization of nitrogen-doped DLC film prepared by radio frequency plasma-enhanced chemical vapor deposition
Masato Tsuchiya, Kouhei Magara, Kengo Tokuda, Hideki Nakazawa (Hirosaki Univ.) CPM2014-75
 [more] CPM2014-75
pp.1-5
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