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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
VLD, DC, CPSY, RECONF, CPM, ICD, IE (Joint) [detail] |
2016-11-29 10:30 |
Osaka |
Ritsumeikan University, Osaka Ibaraki Campus |
Accurate Lithography Simulation Model based on Deep Learning Yuki Watanabe, Tetsuaki Matsunawa, Taiki Kimura, Shigeki Nojima (Toshiba) VLD2016-56 DC2016-50 |
Lithography simulation is an indispensable technology for today's semiconductor manufacturing processes. To achieve accu... [more] |
VLD2016-56 DC2016-50 pp.73-78 |
ICD, SDM |
2006-08-18 10:15 |
Hokkaido |
Hokkaido University |
Suppression effects of threshold voltage variation with Ni FUSI gate electrode for 45nm node and beyond LSTP and SRAM devices Yasunori Okayama, Tomohiro Saito, Aname Oishi, Kazuaki Nakajima, Kouji Matsuo, Syuichi Taniguchi, Takatoshi Ono, Kazuhiro Nakayama, Ryota Watanabe, Ayumi Eiho, Taiki Komoda, Taiki Kimura, Mssahumi Hamaguchi, Yoichi Takekawa, Tomonori Aoyama (TOSHIBA) |
[more] |
SDM2006-145 ICD2006-99 pp.115-120 |
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