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Committee Date Time Place Paper Title / Authors Abstract Paper #
EMT, IEE-EMT 2022-11-17
10:00
Tokyo Kikai-Shinko-Kaikan Bldg.
(Primary: On-site, Secondary: Online)
Generalization capability improvement of fine-defect discrimination on dielectric surface using optical linear discrimination analysis filter with error detection
Shingo Shimada, Jun-ichiro Sugisaka, Koichi Hirayama, Takashi Yasui (Kitami Inst. Tech.) EMT2022-53
Various optical measurement methods have been developed to precisely identify the defects on the surface of dielectric s... [more] EMT2022-53
pp.53-58
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