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Committee Date Time Place Paper Title / Authors Abstract Paper #
ICD, CPSY 2014-12-02
14:50
Tokyo Kikai-Shinko-Kaikan Bldg. Measurements and Evaluations of Aging Degradation Caused by Plasma Induced Damage in 65 nm Process
Ryo Kishida, Azusa Oshima, Kazutoshi Kobayashi (Kyoto Inst. Tech.) ICD2014-106 CPSY2014-118
Degradations of reliability caused by plasma induced damage (PID) have become a significant concern with miniaturizing a... [more] ICD2014-106 CPSY2014-118
pp.123-128
ICD, SDM 2014-08-05
14:55
Hokkaido Hokkaido Univ., Multimedia Education Bldg. Initial Frequency Degradation on Ring Oscillators in 65-nm SOTB Process Caused by Plasma-Induced Damage
Azusa Oshima, Ryo Kishida, Michitarou Yabuuchi, Kazutoshi Kobayashi (KIT) SDM2014-79 ICD2014-48
Reliability issues, such as plasma-induced damage (PID) and Bias Temperature
Instability (BTI), become dominant on inte... [more]
SDM2014-79 ICD2014-48
pp.93-98
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