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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
VLD, HWS, ICD |
2024-03-01 09:45 |
Okinawa |
(Primary: On-site, Secondary: Online) |
VLD2023-121 HWS2023-81 ICD2023-110 |
(To be available after the conference date) [more] |
VLD2023-121 HWS2023-81 ICD2023-110 pp.113-118 |
VLD, DC, RECONF, ICD, IPSJ-SLDM (Joint) [detail] |
2021-12-02 15:35 |
Online |
Online |
Mask Optimization Method Using Simulated Quantum Annealing Yukihide Kohira, Haruki Nakayama, Naoki Nonaka (Univ. of Aizu), Tomomi Matsui, Atsushi Takahashi (Tokyo Tech), Chikaaki Kodama (KIOXIA Corporation) VLD2021-45 ICD2021-55 DC2021-51 RECONF2021-53 |
To realize continuously scaling down of technology node, progressing manufacturing process by optical lithography is req... [more] |
VLD2021-45 ICD2021-55 DC2021-51 RECONF2021-53 pp.162-167 |
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