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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
PRMU |
2009-03-14 11:45 |
Miyagi |
Tohoku Institute of Technology |
Linear discriminant feature transform Masayoshi Ogura, Takahiro Takamiya, Toshikazu Wada (Wakayama Univ.), Shunji Maeda, Kaoru Sakai (Hitachi) PRMU2008-269 |
[more] |
PRMU2008-269 pp.197-204 |
PRMU |
2009-03-14 16:00 |
Miyagi |
Tohoku Institute of Technology |
Defect detection based on self reference for wafer inspection Tetsuya Asami, Toshikazu Wada (Wakayama Univ.), Kaoru Sakai, Shunji Maeda (Hitachi, LTD.) PRMU2008-283 |
[more] |
PRMU2008-283 pp.287-292 |
PRMU |
2006-09-08 13:20 |
Fukuoka |
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LSI wafer inspection method using recursive splitting of feature space Kaoru Sakai, Shunji Maeda (HPERL) |
[more] |
PRMU2006-69 pp.65-72 |
PRMU |
2006-03-16 09:00 |
Fukuoka |
Kyushu Univ. |
Recognition Method of Minute Defect Based on Statistical Outlier Detection using Plural Pattern Images Kaoru Sakai, Shunji Maeda (Hitachi) |
[more] |
PRMU2005-233 pp.1-6 |
PRMU, NLC |
2005-09-21 10:00 |
Tokyo |
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Recognition Method of Minute Defect Based on Comparison to Statistical Pattern and Outlier Detection on Feature Space Kaoru Sakai, Shunji Maeda (Hitachi) |
Reductions of the noise caused by the pattern shape difference and the sampling errors are essential to recognize a minu... [more] |
NLC2005-26 PRMU2005-53 pp.11-16 |
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