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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
PRMU 2009-03-14
11:45
Miyagi Tohoku Institute of Technology Linear discriminant feature transform
Masayoshi Ogura, Takahiro Takamiya, Toshikazu Wada (Wakayama Univ.), Shunji Maeda, Kaoru Sakai (Hitachi) PRMU2008-269
 [more] PRMU2008-269
pp.197-204
PRMU 2009-03-14
16:00
Miyagi Tohoku Institute of Technology Defect detection based on self reference for wafer inspection
Tetsuya Asami, Toshikazu Wada (Wakayama Univ.), Kaoru Sakai, Shunji Maeda (Hitachi, LTD.) PRMU2008-283
 [more] PRMU2008-283
pp.287-292
PRMU 2006-09-08
13:20
Fukuoka   LSI wafer inspection method using recursive splitting of feature space
Kaoru Sakai, Shunji Maeda (HPERL)
 [more] PRMU2006-69
pp.65-72
PRMU 2006-03-16
09:00
Fukuoka Kyushu Univ. Recognition Method of Minute Defect Based on Statistical Outlier Detection using Plural Pattern Images
Kaoru Sakai, Shunji Maeda (Hitachi)
 [more] PRMU2005-233
pp.1-6
PRMU, NLC 2005-09-21
10:00
Tokyo   Recognition Method of Minute Defect Based on Comparison to Statistical Pattern and Outlier Detection on Feature Space
Kaoru Sakai, Shunji Maeda (Hitachi)
Reductions of the noise caused by the pattern shape difference and the sampling errors are essential to recognize a minu... [more] NLC2005-26 PRMU2005-53
pp.11-16
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