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Committee Date Time Place Paper Title / Authors Abstract Paper #
OFT 2008-01-24
16:40
Hiroshima   Development of high sensitive analysis technique by CRD (Cavity Ring Down) method with optical fiber
Masakazu Takagi, Masanori Matsuura, Shigenori Itsuzaki (TATSUTA ELECTRIC WIRE & CABLE) OFT2007-55
The online quality control of impurities such as water in highly pure materials used for semiconductor manufactureis nee... [more] OFT2007-55
pp.33-36
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