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Committee Date Time Place Paper Title / Authors Abstract Paper #
SCE 2011-10-12
15:40		 Tokyo Kikai-Shinko-Kaikan Bldg. Development of Nb multi-layer Advanced Fabrication Process for Large-scale SFQ Circuits
Shuichi Nagasawa, Kenji Hinode, Tetsuro Satoh, Mutsuo Hidaka (ISTEC-SRL), Akira Fujimaki, Hiroyuki Akaike (Nagoya Uni.), Nobuyuki Yoshikawa (Yohohama National Uni.), Kazuyoshi Takagi, Naofumi Takagi (Kyoto Uni.) SCE2011-18		 We have been developing a Nb multi-layer fabrication process for large-scale SFQ circuits. We have been evaluating both ... [more] SCE2011-18
pp.37-42
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