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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM, EID |
2014-12-12 11:00 |
Kyoto |
Kyoto University |
Irradiation Effect of Carbon-Based Polyatomic Ions on Si Substrate Mitsuaki Takeuchi, Kyohei Hayashi, Hiromichi Ryuto, Gikan H. Takaoka (Kyoto Univ.), Tsutomu Nagayama, Koji Matsuda (Nissin Ion Equipment) EID2014-17 SDM2014-112 |
Irradiation damage on Si(100) substrates which were irradiated with C$_{n}$H$_{n}^{+}$($n$=3, 7, 14) and C$_{n}$H$_{2n+1... [more] |
EID2014-17 SDM2014-112 pp.21-24 |
SDM |
2012-12-07 11:00 |
Kyoto |
Kyoto Univ. (Katsura) |
Surface Modification of Glass Substrate by Ion Beam Irradiation of Ionic Liquid BMIM-PF6 Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H. Takaoka (Kyoto Univ.) SDM2012-119 |
Ionic liquids(ILs) are known to be potential solvents for green chemistry in the recent years,
which are molten salt a... [more] |
SDM2012-119 pp.25-30 |
SDM |
2012-12-07 11:15 |
Kyoto |
Kyoto Univ. (Katsura) |
Molecular mass dependence of irradiation effects on silicon surface by normal hydrocarbon ion beams Kosuke Imanaka, Mitsuaki Takeuchi, Hiromichi Ryuto, Gikan H. Takaoka (Kyoto Univ.) SDM2012-120 |
Si substrates irradiated with polyatomic ions, which wereC$_{3}$H$_{7}^{+}$,C$_{6}$H$_{13}^{+}$\ and C$_{12}$H$_{25}^{+}... [more] |
SDM2012-120 pp.31-35 |
SDM |
2010-12-17 15:10 |
Kyoto |
Kyoto Univ. (Katsura) |
Irradiation Effects of Silicon Surface by Polyatomic Ion Beams Mitsuaki Takeuchi, Hiromichi Ryuto, Gikan H. Takaoka (Kyoto Univ.) SDM2010-197 |
C$_{3}$H$_{7}^{+}$}\ and C$_{6}$H$_{13}^{+}$\ polyatomic ion beams generated from n-octane were irradiated with 1 keV/CH... [more] |
SDM2010-197 pp.69-72 |
SDM |
2009-12-04 11:40 |
Nara |
NAIST |
Si substrate processing by ethanol cluster ion beam technique Hiroshi Mukai, Hiromichi Ryuto, Mitsuaki Takeuchi, Gikan H. Takaoka (Kyoto Univ.) SDM2009-158 |
(Advance abstract in Japanese is available) [more] |
SDM2009-158 pp.39-41 |
SDM |
2008-12-05 11:10 |
Kyoto |
Kyoto University, Katsura Campus, A1-001 |
Low-damage high-rate sputtering of silicon induced by ethanol cluster ion beam Hiromichi Ryuto, Ryosuke Ozaki, Gikan H. Takaoka (Kyoto Univ.) SDM2008-186 |
Irradiation effect of an ethanol cluster ion beam on silicon surface was investigated. The cluster size distribution was... [more] |
SDM2008-186 pp.11-15 |
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