|
|
All Technical Committee Conferences (Searched in: All Years)
|
|
Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
|
Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2024-02-21 11:25 |
Tokyo |
Tokyo University-Hongo-Engineering Bldg.4 (Primary: On-site, Secondary: Online) |
[Invited Talk]
Development of Backside Buried Metal Layer Technology to Enhance Power Integrity of Three-Dimensional Integrated Circuits Naoya Watanabe, Yuuki Araga, Haruo Shimamoto (AIST), Makoto Nagata (Kobe Univ.), Katsuya Kikuchi (AIST) SDM2023-83 |
[more] |
SDM2023-83 pp.9-15 |
ICD, SDM, ITE-IST [detail] |
2020-08-06 13:50 |
Online |
Online |
Over-the-top Si Interposer Embedding Backside Buried Metal to Reduce Power Supply Impedance Takuji Miki, Makoto Nagata, Akihiro Tsukioka (Kobe Univ.), Noriyuki Miura (Osaka Univ.), Takaaki Okidono (ECSEC), Yuuki Araga, Naoya Watanabe, Haruo Shimamoto, Katsuya Kikuchi (AIST) SDM2020-5 ICD2020-5 |
A 2.5D structure with a Si interposer stacked on a CMOS chip is developed to reduce power supply impedance. A backside b... [more] |
SDM2020-5 ICD2020-5 pp.19-24 |
SDM |
2019-02-07 13:10 |
Tokyo |
|
[Invited Talk]
Stress Investigation of Annular-Trench-Isolated (ATI) Through Silicon Via (TSV) Wei Feng, Naoya Watanabe, Haruo Shimamoto, Masahiro Aoyagi, Katsuya Kikuchi (AIST) SDM2018-93 |
The methods as parylene substitute of SiO2 as dielectric layer and annular structure lose efficacy for thermal stress re... [more] |
SDM2018-93 pp.9-14 |
SDM |
2017-02-06 15:35 |
Tokyo |
Tokyo Univ. |
[Invited Talk]
Development of a Wet Cleaning Process for High-Yield Formation of via-last TSVs Naoya Watanabe (AIST), Hidekazu Kikuchi, Azusa Yanagisawa (LAPIS), Haruo Shimamoto, Katsuya Kikuchi, Masahiro Aoyagi (AIST), Akio Nakamura (LAPIS) SDM2016-145 |
[more] |
SDM2016-145 pp.35-40 |
|
|
|
Copyright and reproduction :
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
|
[Return to Top Page]
[Return to IEICE Web Page]
|