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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2006-06-21
13:50		 Hiroshima Faculty Club, Hiroshima Univ. Characterization of Interfacial Reactions in Al2O3/SiNx/poly-Si Stack Structure by Photoemission Measurements
Hiroaki Furukawa, Masahiro Taira, Akio Ohta, Hiroshi Nakagawa, Hideki Murakami, Seiichi Miyazaki (Hiroshima Univ.), Kenji Komeda, Mitsuhiro Horikawa, Kuniaki Koyama, Hideharu Miyake (Elpida Memory) 		 [more] SDM2006-44
pp.13-17
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