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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2010-10-21
15:30		 Miyagi Tohoku University Mechanism of Work Function Modulation of PtSi Alloying with Yb
Jumpei Ishikawa, Jun Gao, Shun-ichiro Ohmi (Tokyo Tech) SDM2010-154		 The work function modulation of PtSi by alloying with Yb to achieve ultra low contact resistance for advanced CMOS was i... [more] SDM2010-154
pp.13-16
SDM 2010-10-21
16:10		 Miyagi Tohoku University A Study on Precise Control of PtSi Work Function by Alloying with Hf
Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Tech) SDM2010-155		  [more] SDM2010-155
pp.17-20
ED, SDM 2010-07-02
11:45		 Tokyo Tokyo Inst. of Tech. Ookayama Campus Modulation of PtSi work function by alloying with low work function metal
Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Inst. of Tech.) ED2010-91 SDM2010-92		  [more] ED2010-91 SDM2010-92
pp.173-176
SDM 2009-10-29
14:30		 Miyagi Tohoku University A study on Improvement of Thermal Stability for PtSi Alloying with Hf Utilizing Two-Step Silicidation Process
Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Inst. of Tech.) SDM2009-118		 To improve the thermal stability of PtxHfySi formed at 400℃/60 min, 2-step silicidation process was investigated. By usi... [more] SDM2009-118
pp.7-10
SDM 2008-10-10
13:30		 Miyagi Tohoku Univ. A study on work function modulation in PtSi alloying with Hf
Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Tech) SDM2008-162		 Mechanisms of work function modulation in PtSi alloying with Hf was investigated. When a silicidation of Pt(15 nm)/Hf(8 ... [more] SDM2008-162
pp.41-44
 Results 1 - 5 of 5  /   
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