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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2015-08-10
13:20		 Aomori   Preparation and characterization of SiC thin films on AlN/Si(110) substrates by pulsed laser deposition
Kazuki Meguro, Shunki Narita, Hideki Nakazawa (Hirosaki Univ.) CPM2015-31		 We have formed a SiC interfacial buffer layer on AlN/Si(110) substrates at a low temperature, and grew SiC films on the ... [more] CPM2015-31
pp.1-5
CPM 2015-08-10
14:00		 Aomori   Growth of epitaxial SiC thin films on AlN/Si(110) substrates by pulsed laser deposition
Shunki Narita, Kazuki Meguro, Hideki Nakazawa (Hirosaki Univ.) CPM2015-33		 We have grown aluminum nitride (AlN) films on Si(110) substrate by pulsed laser deposition using an AlN target, and inve... [more] CPM2015-33
pp.11-14
CPM 2014-09-04
13:55		 Yamagata The 100th Anniversary Hall, Yamagata University SiC heteroepitaxial growth on an AlN layer formed on off-axis Si(001) substrates
Kazuki Meguro, Tsugutada Narita, Toshihiro Uemura, Hideki Nakazawa (Hirosaki Univ.) CPM2014-76		 We have grown aluminum nitride (AlN) films on 4º off-axis Si(100) and Si(110) substrates by pulsed laser deposition usin... [more] CPM2014-76
pp.7-12
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