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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2022-11-10 14:00 |
Online |
Online |
[Invited Talk]
Modeling Electrical Properties of CrSi Thin Films Kenichiro Sonoda, Nobuhito Shiraishi, Kazuyoshi Maekawa, Nozomi Ito, Eiji Hasegawa, Tamotsu Ogata (Renesas Electronics) SDM2022-67 |
Electrical resistivity of CrSi thin films is modeled considering phase transitions and grain growth during thermal annea... [more] |
SDM2022-67 pp.14-18 |
SDM |
2022-10-19 14:30 |
Online |
Online |
The effect of microstructures of CrSiC thin film resistors on the electrical properties Nozomi Ito, Kazuyoshi Maekawa, Yuji Takahashi, Takashi Tonegawa (Renesas) SDM2022-59 |
With the recent trend toward higher integration of electronic circuits, the combination of an analog front end (AFE) and... [more] |
SDM2022-59 pp.20-23 |
SDM |
2011-02-07 13:40 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Dependence of Ti-Based Self-Formed Barrier Structure on Dielectric-Layer Composition Kazuyuki Kohama, Kazuhiro Ito, Yutaka Sonobayashi (Kyoto Univ.), Kazuyuki Ohmori, Kenichi Mori, Kazuyoshi Maekawa (Renesas), Yasuharu Shirai (Kyoto Univ.), Masanori Murakami (The Ritsumeikan) SDM2010-221 |
Ti-based self-formed barrier layer using Cu(Ti) alloy seed applied to 45 nm-node dual-damascene interconnects was report... [more] |
SDM2010-221 pp.31-35 |
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