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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM, LQE, OPE, EMD, R 2024-08-30
12:40		 Aomori Hirosaki University (Aomori, Online)
(Primary: On-site, Secondary: Online)		 [Invited Talk] Trends in Advanced LSI Interconnect Technology and Applications of Graphene
Kazuyoshi Ueno (SIT) R2024-24 EMD2024-18 CPM2024-34 OPE2024-74 LQE2024-21		 For LSI interconnects beyond the 2nm-node, where the minimum interconnect width will be 10nm or less, the problems of in... [more] R2024-24 EMD2024-18 CPM2024-34 OPE2024-74 LQE2024-21
pp.55-60
SDM 2018-02-08
11:25		 Tokyo Tokyo Univ. (Tokyo) [Invited Talk] Moisture Barrier Properties of Capping Graphene for Copper Metallization
Kazuyoshi Ueno, Ploybussara Gomasang, Takumi Abe (SIT), Kenji Kawahara (Kyushu Univ.), Yoko Wasai (Horiba Techno), Nguyen Thanh Cuong (NIMS), Nataliya Nabatova-Gabain (Horiba Techno), Hiroki Ago (Kyushu Univ.), Susumu Okada (Univ. Tsukuba) SDM2017-98		 (To be available after the conference date) [more] SDM2017-98
pp.5-9
SDM 2016-01-22
14:15		 Tokyo Sanjo Conference Hall, The University of Tokyo (Tokyo) Fabrication of Multilayer Graphene by Solid-Phase Precipitation with Current Stress
MD Sahab Uddin, Hiroyasu Ichikawa, Shota Sano (SIT), Kazuyoshi Ueno (SIT/RCGI) SDM2015-115		 Multilayer graphene (MLG) was fabricated by solid phase precipitation with a new technique which introduces current stre... [more] SDM2015-115
pp.29-32
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