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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
EID, ITE-IDY, IEE-EDD 2012-01-27
14:46
Akita Akita University Optical charasteristics for high definition FED of micro electron source
Takahiro Fujino, Akifumi Koike (Shizuoka Univ.), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (AIST), Hidekazu Murata, Kentaro Sakai (Meijo Univ.), Yoichiro Neo, Toru Aoki, Hidenori Mimura (Shizuoka Univ.)
 [more]
ED 2011-10-20
16:45
Aomori   Study on the electron gun for Micro-Column Electron Beam
Takahiro Fujino, Akifumi Koike (RIE Shizuoka Univ), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (AIST), Hidekazu Murata, Kentaro Sakai (Meijo Univ), Yoichiro Neo, Toru Aoki, Hidenori Mimura (RIE Shizuoka Univ) ED2011-65
Our final goal is to fabricate truly meaning micro-column, that consists of micro-sized field emitter and electro optics... [more] ED2011-65
pp.27-32
SDM, ED 2011-02-23
15:40
Hokkaido Hokkaido Univ. Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography
Yoichiro Neo, Yasuo Takagi, Takahiro Fujino, Akifumi Koike (Shizuoka Univ. RIE), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (ASIT), Hidekazu Murata, Kentaro Sakai (Meijo Univ.), Toru Aoki, Hidenori Mimura (Shizuoka Univ. RIE) ED2010-196 SDM2010-231
 [more] ED2010-196 SDM2010-231
pp.25-29
ED 2009-10-15
14:20
Fukui   In-situ, real time observation of operating condition of multi emitters
Kentaro Sakai, Daisuke Tsubaki, Hidekazu Murata, Hiroshi Shimoyama (Meijo Univ.), Kazuto Sakemura, Nobuyasu Negishi, Atsushi Watanane (Pioneer Corp.) ED2009-118
We have developed an electron optical instrument for evaluation of multi emitters. The instrument is a versatile emissi... [more] ED2009-118
pp.11-16
 Results 1 - 4 of 4  /   
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