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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2021-10-21
Online Online Current Measurement Platform Applied for Statistical Measurement of Discharge Current due to Traps in SiN Dielectrics
Koga Saito, Hayato Suzuki, Hyeonwoo Park, Rihito Kuroda (Tohoku Univ.), Akinobu Teramoto (Hiroshima Univ.), Tomoyuki Suwa, Shigetoshi Sugawa (Tohoku Univ.) SDM2021-51
A current measurement platform to measure current across dielectrics with a high precision of $10^{-17}$ A applied for s... [more] SDM2021-51
SDM 2020-10-22
Online Online High capacitance density high breakdown voltage textured deep trench SiN capacitors toward 3D integration
Koga Saito, Ayano Yoshida, Rihito Kuroda (Tohoku Univ.), Hiroshi Shibata, Taku Shibaguchi, Naoya kuriyama (LAPIS Semiconductor Miyagi), Shigetoshi Sugawa (Tohoku Univ.) SDM2020-15
High capacitance density and High breakdown voltage textured deep trench SiN capacitors are presented. The developed cap... [more] SDM2020-15
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