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Committee Date Time Place Paper Title / Authors Abstract Paper #
ITE-IDY, EID, SID-JC [detail] 2019-08-02
14:40		 Tokyo Kikai-Shinko-Kaikan Bldg. [Invited Lecture] Development of G6 Exposure Tool for 1.2 μm Resolution
Kouhei Nagano, Nobuhiko Yabu, Manabu Hakko, Miwako Ando, Nozomu Izumi, Yoshinori Osaki (Canon) 		 [more]
EST, OPE, LQE, EMT, PN, MWP, IEE-EMT [detail] 2015-01-29
10:55		 Osaka   Shape estimation of a diffractive optical element with background scattered light
Manabu Hakko (Canon), Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, Yoshio Hayasaki (Utsunomiya Univ.) PN2014-31 OPE2014-156 LQE2014-143 EST2014-85 MWP2014-53		  [more] PN2014-31 OPE2014-156 LQE2014-143 EST2014-85 MWP2014-53
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