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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
LQE, OPE |
2013-06-21 10:35 |
Tokyo |
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Silicon photonics devices on 300 mm wafer fabricated by using ArF immersion lithography Tomohiro Kita, Yuichiro Tanushi, Masaki Nara, Syu Hirano (Tohoku Univ.), Munehiro Toyama, Miyoshi Seki, Keiji Koshino, Nobuyuki Yokoyama, Minoru Ohtsuka, Akinobu Sugiyama, Eiichi Ishitsuka, Tsukuru Sano, Tsuyoshi Horikawa (AIST), Hirohito Yamada (Tohoku Univ.) OPE2013-7 LQE2013-17 |
We have investigated optical characteristics of Si photonics devices formed on 300 mm SOI wafers by using ArF immersion ... [more] |
OPE2013-7 LQE2013-17 pp.1-5 |
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