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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2011-02-07
13:40
Tokyo Kikai-Shinko-Kaikan Bldg. Dependence of Ti-Based Self-Formed Barrier Structure on Dielectric-Layer Composition
Kazuyuki Kohama, Kazuhiro Ito, Yutaka Sonobayashi (Kyoto Univ.), Kazuyuki Ohmori, Kenichi Mori, Kazuyoshi Maekawa (Renesas), Yasuharu Shirai (Kyoto Univ.), Masanori Murakami (The Ritsumeikan) SDM2010-221
Ti-based self-formed barrier layer using Cu(Ti) alloy seed applied to 45 nm-node dual-damascene interconnects was report... [more] SDM2010-221
pp.31-35
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