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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2008-10-10 13:00 |
Miyagi |
Tohoku Univ. |
The Application Property of B18H22 Implantation for Millisecond Annealing Yoji Kawasaki, Seiichi Endo, Masashi Kitazawa, Yoshiki Maruyama, Tomohiro Yamashita, Takashi Kuroi, Hidefumi Yoshimura, Masahiro Yoneda (Renesas) SDM2008-161 |
We investigated the application properties of cluster implantation for milli-second annealing processing. We successful... [more] |
SDM2008-161 pp.37-40 |
SDM, ED |
2008-07-09 16:20 |
Hokkaido |
Kaderu2・7 |
[Invited Talk]
Recent Progress on Nanoprobe and Nanoneedle Masaki Tanemura, Masashi Kitazawa, Yoshitaka Sugita, Ako Miyawaki, Masaki Kutsuna, Yasuhiko Hayashi (Nagoya Inst. of Tech.), Shu Ping Lau (Nanyang Tech. Univ.) ED2008-50 SDM2008-69 |
Ar+ ion bombardment of carbon surfaces (both bulk carbon and carbon-coated substrates) induced the growth of conical pro... [more] |
ED2008-50 SDM2008-69 pp.59-64 |
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