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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, OME 2008-04-11
13:15
Okinawa Okinawa Seinen Kaikan Clarification of ITO/AlNiNd contact formation mechanism
Kazumasa Kawase, Tsukasa Motoya, Junji Tanimura (Mitsubishi Electric Corp.), Naoki Tsumura (メルコ・ディスプレイ・テクノロジ), Kensuke Nagayama (メルコ・ディスプレイ・テクノロジー), Nobuaki Ishiga (メルコ・ディスプレイ・テクノロジ), Kazunori Inoue (Mitsubishi Electric Corp.) SDM2008-8 OME2008-8
The chemical bonding state, crystallized state and element distribution near ITO/AlNiNd interface are investigated. In t... [more] SDM2008-8 OME2008-8
pp.37-40
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