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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2007-03-15
15:25		 Tokyo Kikai-Shinko-Kaikan Bldg. Key Process Technology of Reliable Sub Micron Capacitor for High Density Chain-FeRAM
Koji Yamakawa, Tohru Ozaki, Hiroyuki Kanaya, Iwao Kunishima, Yoshinori Kumura, Yoshiro Shimojo, Susumu Shuto, Osamu Hidaka, Yuki Yamada, Soi chi Yamazaki, Takeshi Hamamoto, Shinichiro Shiratake, Daisaburo Takashima, Tadashi Miyakawa, Sumito Ohtsuki (Toshiba) 		 [more] SDM2006-259
pp.27-32
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