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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2007-11-16
15:10		 Niigata Nagaoka University of Technology HIgh rate reactive sputter-deposition of TiO2 films by using two sputtering sources
Tetsuya Sakai, Osamu Kamiya, Yoichi Hoshi (Tokyo Polytechnic Univ.), Hidehiko Shimizu (Niigata Univ.) CPM2007-109		  [more] CPM2007-109
pp.23-27
CPM 2006-08-07
15:50		 Iwate Iwate Univ. High Rate deposition of TiO2 thin films by plasma assisted electron beam evaporation
Yoichi Hoshi, Ｓｈｉｇｅｔｏｓｈｉ Ｋａｗａｇｕｃｈｉ, Osamu Kamiya (Ｔｏｋｙｏ Ｐｏｌｙｔｅｃｈｎｉｃ Ｕｎｉｖ．), Hidehiko Shimizu (Ｎｉｉｇａｔａ Ｕｎｉｖ．) 		 [more] CPM2006-45
pp.25-29
CPM 2005-11-12
12:10		 Fukui   Investigation of sputter-deposition process in pulse sputtering
Yoichi Hoshi (Tokyo Polytchinic Univ.), Yuji Kuniyoshi (Tokyo Polytechinic Univ.), Osamu Kamiya (Canon Inc.), Hidehiko Shimizu (Niigata Univ.) 		 [more] CPM2005-168
pp.33-38
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