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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2015-10-30 15:30 |
Miyagi |
Niche, Tohoku Univ. |
Study of process temperature of Al2O3 atomic layer deposition using high accuracy process gasses supply controller Hisaya Sugita, Yasumasa Koda, Tomoyuki Suwa, Rihito Kuroda, Tetsuya Goto, Hidekazu Ishii (Tohoku Univ.), Satoru Yamashita (Fujikin), Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2015-83 |
[more] |
SDM2015-83 pp.63-68 |
SDM |
2011-10-21 15:25 |
Miyagi |
Tohoku Univ. (Niche) |
High Purity Metal Organic Gas Distribution System Satoru Yamashita, Hidekazu Ishii, Yoshinobu Shiba, Masafumi Kitano, Yasuyuki Shirai, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2011-112 |
The gas flow control is important factor that influenced to the concentration of process gas and the pressure of process... [more] |
SDM2011-112 pp.85-90 |
SDM |
2007-03-15 15:50 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Development of Microwave-Excited Plasma Enhanced Metal-Organic Chemical Vapor deposition System and Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Film Ichirou Takahashi, Kiyoshi Funawa, Keita Azumi, Satoru Yamashita, Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ) |
[more] |
SDM2006-260 pp.33-37 |
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