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Committee Date Time Place Paper Title / Authors Abstract Paper #
OME, SDM 2015-04-30
13:25
Okinawa Oh-hama Nobumoto Memorial Hall Temperature Analysis of Si Films during Blue Multi-Laser Diode Annealing
Tatsuya Okada, Seita Kamimura, Takashi Noguchi (Univ. Ryukyus) SDM2015-14 OME2015-14
We have reported that Blue Multi-Laser Diode Annealing (BLDA) is effective to crystallize Si films for next generation S... [more] SDM2015-14 OME2015-14
pp.53-55
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