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Abstract
Paper #
SDM
,
ED
(Workshop)
2012-06-27
16:00
Okinawa
Okinawa Seinen-kaikan
A New RSD Bottom Gate Poly-Si Thin Film Transistor With Inside Spacer
Yi-Hsiang Chiu
,
Shan-Jen Yang
,
Feng-Tso Chien
(
Feng Chia Univ.
),
Chii-Wen Chen
(
Minghsin Univ.
)
In this research, a raised source/drain (RSD), accompanied with an inside spacer bottom gate poly-Si thin film transisto...
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