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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
ICD, SDM 2009-07-16
15:25
Tokyo Tokyo Institute of Technology Comprehensive Design Methodology of Dopant Profile to Suppress Gate-LER-induced Threshold Voltage Variability in sub-30 nm NMOSFETs
Hidenobu Fukutome (Fujitsu Microelectronics Limited), Yoko Hori (Fujitsu Quality Lab. Limited), Kimihiko Hosaka, Yoichi Momiyama, Shigeo Satoh, Toshihiro Sugii (Fujitsu Microelectronics Limited) SDM2009-106 ICD2009-22
We have demonstrated for the first time that parallel extension implantation tilted along the gate width direction enabl... [more] SDM2009-106 ICD2009-22
pp.49-52
ICD, SDM 2008-07-18
15:30
Tokyo Kikai-Shinko-Kaikan Bldg. High Performance Sub-35 nm Bulk CMOS with Hybrid Gate Structures of NMOS; Dopant Confinement Layer (DCL) / PMOS; Ni-FUSI by Using Flash Lamp Anneal (FLA) in Ni-Silicidation -- Hybrid Gate Structures --
Hiroyuki Ohta (Fujitsu Lab.), Kazuo Kawamura (FML), Hidenobu Fukutome (Fujitsu Lab.), Mitsugu Tajima, Ken-ichi Okabe (FML), Keiji Ikeda, Kimihiko Hosaka, Yoichi Momiyama, Shigeo Satoh, Toshihiro Sugii (Fujitsu Lab.) SDM2008-148 ICD2008-58
We applied Flash Lamp Annealing (FLA) in Ni-silicidation to our developed Dopant Confinement Layer (DCL) structure for t... [more] SDM2008-148 ICD2008-58
pp.115-120
ICD, SDM 2005-08-19
15:15
Hokkaido HAKODATE KOKUSAI HOTEL High-k; Last Card for the Leakage Currents
Tadayoshi Enomoto (Chuo Univ.), Mariko Takayanagi (Toshiba), Shigeo Satoh (Fujitu), Koji Nii (Renesas), Akira Nishiyama (Toshiba), ハセ タカシ (NEC), Mototsugu Hamada (Toshiba), Jiro Yugami (Renesas)
(Advance abstract in Japanese is available) [more] SDM2005-155 ICD2005-94
pp.73-78
ICD 2005-04-15
14:30
Fukuoka   New Development of Neutron-induced Soft-Error Simulation Technology
Taiki Uemura, Yoshiharu Tosaka, Yoshio Ashizawa, Hideki Oka, Shigeo Satoh (Fujitsu lab.)
In these years, the interest in soft error becomes increasing. This comes from the problem that the soft error occurs no... [more] ICD2005-19
pp.37-42
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