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Committee Date Time Place Paper Title / Authors Abstract Paper #
EA, US
(Joint)
2023-12-22
13:00
Fukuoka   [Poster Presentation] c-Axis tilted epitaxial ScAlN self-supporting thin film resonators with epitaxial ZnO sacrificial layer
Shiori Kobayashi, Takahiko Yanagitani (Waseda Univ.) US2023-59
Piezoelectric thin films with high shear mode electromechanical coupling coefficient k´352 are attractive to improve S/N... [more] US2023-59
pp.18-23
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