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Committee Date Time Place Paper Title / Authors Abstract Paper #
ED 2016-08-10
11:50		 Tokyo Kikai-Shinko-Kaikan Bldg. Application of the Frequency Delta Sigma Modulator to Digital-Output Sensors
Koichi Maezawa, Shunya Fujino, Takahiro Yamaoka, Masaki Yamakawa, Tomoki Shimada, Yuichiro Kakutani, Takumi Tajika, Masayuki Mori (Univ. Toyama) ED2016-42		  [more] ED2016-42
pp.65-70
ED, SDM 2016-03-04
11:15		 Hokkaido Centennial Hall, Hokkaido Univ. Delta Sigma Modulation Microphone Sensors Using a HEMT and a Cavity Resonator
Takahiro Yamaoka, Shunya Fujino, Ryo Yamagishi, Masaki Yamakawa, Tomoki Shimada, Masayuki Mori, Koichi Maezawa (Univ. Toyama) ED2015-129 SDM2015-136		  [more] ED2015-129 SDM2015-136
pp.45-48
ED 2013-08-09
09:00		 Toyama University of Toyama MEMS Microphones on InP Substrates for High Performance Digital Ultrasonic Sensors
Shunya Fujino, Yuta Mizuno, Kazuhiro Takaoka, Masayuki Mori, Koichi Maezawa (Univ. of Toyama) ED2013-44		 This paper describes the fabrication process of the MEMS microphones on InP substrates. The process is based on ozone as... [more] ED2013-44
pp.33-36
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