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Committee Date Time Place Paper Title / Authors Abstract Paper #
US 2009-09-30
09:50		 Hokkaido Noboribetsu Grand Hotel Large-area fabrication of (11-20) textured ZnO piezoelectric films using magnetron sputtering with linear erosion.
Takayuki Kawamoto (Doshisha Univ./Omron Corp.), Takahiko Yanagitani (Nagoya Inst. Tech.), Mami Matsukawa, Yoshiaki Watanabe (Doshisha Univ.), Yoshikazu Mori, Syo Sasaki, Masatoshi Oba (Omron Corp.) US2009-49		 In previous studies, fabrication of (11-20) textured ZnO piezoelectric films have been reported by using RF magnetron sp... [more] US2009-49
pp.65-70
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