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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2016-01-22 14:35 |
Tokyo |
Sanjo Conference Hall, The University of Tokyo |
[Invited Talk]
Effect of Wafer Thinning on DRAM Characteristics for Bumpless Interconnects and WOW Applications Y. S. Kim, S. Kodama, Y. Mizushima, T. Nakamura, N. Maeda, K. Fujimoto (Tokodai), A. Kawai (DISCO), T. Ohba (Tokodai) SDM2015-116 |
(To be available after the conference date) [more] |
SDM2015-116 pp.33-37 |
SDM |
2010-02-05 15:45 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Defects in Cu/low-k Interconnects Probed Using Monoenergetic Positron Beams Akira Uedono (Tsukuba Univ.), Naoya Inoue, Y. Hayashi, K. Eguchi, T. Nakamura, Y. Hirose, Masaki Yoshimaru (STARC), Nagayasu Oshima, Toshiyuki Ohdaira, R. Suzuki (National Institute of Advanced Industrial Science and Technology) SDM2009-190 |
Defects in SiOCH/Cu damascene structures were probed using monoenergetic positron beams. Doppler broadening spectra of t... [more] |
SDM2009-190 pp.49-52 |
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