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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2016-01-22
14:35
Tokyo Sanjo Conference Hall, The University of Tokyo [Invited Talk] Effect of Wafer Thinning on DRAM Characteristics for Bumpless Interconnects and WOW Applications
Y. S. Kim, S. Kodama, Y. Mizushima, T. Nakamura, N. Maeda, K. Fujimoto (Tokodai), A. Kawai (DISCO), T. Ohba (Tokodai) SDM2015-116
(To be available after the conference date) [more] SDM2015-116
pp.33-37
SDM 2010-02-05
15:45
Tokyo Kikai-Shinko-Kaikan Bldg. Defects in Cu/low-k Interconnects Probed Using Monoenergetic Positron Beams
Akira Uedono (Tsukuba Univ.), Naoya Inoue, Y. Hayashi, K. Eguchi, T. Nakamura, Y. Hirose, Masaki Yoshimaru (STARC), Nagayasu Oshima, Toshiyuki Ohdaira, R. Suzuki (National Institute of Advanced Industrial Science and Technology) SDM2009-190
Defects in SiOCH/Cu damascene structures were probed using monoenergetic positron beams. Doppler broadening spectra of t... [more] SDM2009-190
pp.49-52
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