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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM, ED, SDM |
2023-05-19 17:20 |
Aichi |
Nagoya Institute of Technology (Primary: On-site, Secondary: Online) |
AlN film by reactive sputtering as a stressor for Ge photonic devices on Si Jose A. Piedra-Lorenzana, Shohei Kaneko, Takaaki Fukushima, Keisuke Yamane (Toyohashi Univ. Tec.), Junichi Fujikata (Tokushima Univ.), Yasuhiko Ishikawa (Toyohashi Univ. Tec.) ED2023-9 CPM2023-9 SDM2023-26 |
AlN deposited by reactive sputtering is studied as an external stressor for controlling the operating wavelength of near... [more] |
ED2023-9 CPM2023-9 SDM2023-26 pp.36-39 |
SDM, ED, CPM |
2022-05-27 14:40 |
Online |
Online |
Reactive Sputtering of Nitride Dielectric Film for Silicon Photonics Applications Takaaki Fukushima, Jose A. Piedra Lorenzana, Rui Tsuchiya, Takeshi Hizawa, Yasuhiko Ishikawa (Toyohashi Univ. Tech.) ED2022-10 CPM2022-4 SDM2022-17 |
SiNx possesses a thermo-optic coefficient smaller by approximately one order of magnitude than that of Si, being effecti... [more] |
ED2022-10 CPM2022-4 SDM2022-17 pp.13-16 |
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