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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM, ED, SDM 2023-05-19
16:05		 Aichi Nagoya Institute of Technology (Aichi, Online)
(Primary: On-site, Secondary: Online)		 Effect of Ge Epitaxial Buffer Layer on Solid Phase Growth of Ge on Si
Satoki Furuya, Mikiya Kuzutani, Jose A. Piedra-Lorenzana, Takeshi Hizawa, Keisuke Yamane, Yasuhiko Ishikawa (Toyohashi Univ. Tech.) ED2023-6 CPM2023-6 SDM2023-23		  [more] ED2023-6 CPM2023-6 SDM2023-23
pp.24-27
SDM, ED, CPM 2022-05-27
14:40		 Online Online (Online) Reactive Sputtering of Nitride Dielectric Film for Silicon Photonics Applications
Takaaki Fukushima, Jose A. Piedra Lorenzana, Rui Tsuchiya, Takeshi Hizawa, Yasuhiko Ishikawa (Toyohashi Univ. Tech.) ED2022-10 CPM2022-4 SDM2022-17		 SiNx possesses a thermo-optic coefficient smaller by approximately one order of magnitude than that of Si, being effecti... [more] ED2022-10 CPM2022-4 SDM2022-17
pp.13-16
ED 2021-02-22
13:25		 Online Online (Online) ED2020-39 A surface stress sensor fabricated by MEMS technology can detect biomacromolecules such as protein with label- free mann... [more] ED2020-39
pp.5-8
ED 2017-08-09
13:55		 Tokyo Kikai-Shinko-Kaikan Bldg. (Tokyo) Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity
Toshiaki Takahashi, Takeshi Hizawa (TUT), Nobuo Misawa (KAST), Miki Taki (TUT), Kazuaki Sawada, Kazuhiro Takahashi (TUT/JST) ED2017-28		 For detecting unlabeled biomarkers in blood with high sensitivity, we have proposed a biosensor using a MEMS optical int... [more] ED2017-28
pp.5-8
 Results 1 - 4 of 4  /   
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