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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM |
2014-10-24 15:20 |
Nagano |
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Effect of Post-Deposition Annealing in Hydrogen Atmosphere on 4H-SiCMIS Property Prepared by Thermal CVD Method Using Tetraethylorthosilicate Takuo Kanou, Yoshiyuki Akahane, Yuta Kobayashi, Tomohiko Yamakami, Kiichi Kamimura (Shinshu Univ.) CPM2014-109 |
Silicon dioxide films were deposited by the thermal decomposition of tetraethylorthosilicate (TEOS) to form the MIS stru... [more] |
CPM2014-109 pp.25-28 |
CPM |
2014-09-04 14:20 |
Yamagata |
The 100th Anniversary Hall, Yamagata University |
Preparation of Plasma Nitridation Layer on SiC Surface and Examination of Its Thermal Stability Yoshiyuki Akahane, Takuo Kanou, Kouya Ogino, Yuuta Kobayashi, Tomohiko Yamakami, Kiichi Kamimura (Shinshu Univ.) CPM2014-77 |
[more] |
CPM2014-77 pp.13-16 |
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