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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ED |
2010-06-18 12:15 |
Ishikawa |
JAIST |
Methyl-BCN Film using Low Temperature Etching. Hidemitsu Aoki, Makoto Hara, Takuro Masuzumi, Zhiming Lu, Tomohiro Kuki, Chiharu Kimura, Takashi Sugino (Osaka Univ.) ED2010-47 |
[more] |
ED2010-47 pp.75-80 |
ED |
2009-06-11 14:55 |
Tokyo |
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Dependence of Characteristics of Methyl-BCN Film on RF Bias Takuro Masuzumi, Makoto Hara, Hidemitsu Aoki, Zhiming Lu, Chiharu Kimura, Takashi Sugino (Osaka Univ.) ED2009-39 |
[more] |
ED2009-39 pp.15-20 |
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