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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
VLD, DC, CPSY, RECONF, CPM, ICD, IE, IPSJ-SLDM, IPSJ-EMB, IPSJ-ARC (Joint) [detail] |
2017-11-07 13:00 |
Kumamoto |
Kumamoto-Kenminkouryukan Parea |
[Invited Talk]
Innovative Applications of Machine Learning in Lithography and DFM Tetsuaki Matsunawa (Toshiba Memory) VLD2017-50 DC2017-56 |
[more] |
VLD2017-50 DC2017-56 p.131 |
VLD, DC, CPSY, RECONF, CPM, ICD, IE (Joint) [detail] |
2016-11-29 10:30 |
Osaka |
Ritsumeikan University, Osaka Ibaraki Campus |
Accurate Lithography Simulation Model based on Deep Learning Yuki Watanabe, Tetsuaki Matsunawa, Taiki Kimura, Shigeki Nojima (Toshiba) VLD2016-56 DC2016-50 |
Lithography simulation is an indispensable technology for today's semiconductor manufacturing processes. To achieve accu... [more] |
VLD2016-56 DC2016-50 pp.73-78 |
VLD |
2016-03-02 10:55 |
Okinawa |
Okinawa Seinen Kaikan |
Lithography Hotspot Detection Using Histogram of Oriented Light Propagation Yoichi Tomioka (UoA), Tetsuaki Matsunawa (Toshiba) VLD2015-136 |
In recent semiconductor manufacturing process, it is essential to detect and to remove lithography hotspots, which induc... [more] |
VLD2015-136 pp.143-148 |
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM (Joint) [detail] |
2015-12-02 14:55 |
Nagasaki |
Nagasaki Kinro Fukushi Kaikan |
[Invited Talk]
EDA Research Activities in The University of Texas at Austin Tetsuaki Matsunawa (Toshiba) VLD2015-50 DC2015-46 |
International competition in EDA research is getting more intense.
In major international conference, such as DAC or IC... [more] |
VLD2015-50 DC2015-46 p.73 |
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