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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
OME, SDM |
2017-04-21 10:00 |
Kagoshima |
Tatsugochou Shougaigakushuu Center |
Plasma fusion CMP® technology for GaN substrates
-- Evaluation of processing characteristics for plasma fusion CMP® using Ar plasma and ethanol bubbling -- Naoki Yamazaki (Kyushu Univ./Namiki PrecisionJewel Co.,LTD), Toshiro Doi (Kyushu Univ), Hideo Aida (Kyushu Univ./Namiki PrecisionJewel Co.,LTD), Seongwoo Kim, Koki Oyama (Namiki PrecisionJewel Co.,LTD), Shuhei Kurokawa (Kyushu Univ), Yasuhisa Sano (Osaka Univ.), Masaharu Shiratani, Yoko Yamanishi (Kyushu Univ) SDM2017-5 OME2017-5 |
[more] |
SDM2017-5 OME2017-5 pp.19-23 |
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