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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, ED 2011-02-23
15:40
Hokkaido Hokkaido Univ. Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography
Yoichiro Neo, Yasuo Takagi, Takahiro Fujino, Akifumi Koike (Shizuoka Univ. RIE), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (ASIT), Hidekazu Murata, Kentaro Sakai (Meijo Univ.), Toru Aoki, Hidenori Mimura (Shizuoka Univ. RIE) ED2010-196 SDM2010-231
 [more] ED2010-196 SDM2010-231
pp.25-29
ED 2010-10-25
16:35
Kyoto   Fabrication and Evaluation of Electron Gun for the Micro-Column to controll a radiation angle
Takahiro Fujino, Yasuo Takagi, Akifumi Koike (Shizuoka Univ.), Masayoshi Nagao, Tomoya Yoshida (AIST), Hidekazu Murata, Kentaro Sakata (Meijo Univ.), Yoichiro Neo, Toru Aoki, Hidenori Mimura (Shizuoka Univ.) ED2010-135
Our final goal is to fabricate truly meaning micro-column, that consists of micro-sized field emitter and electro optics... [more] ED2010-135
pp.39-42
ED 2009-10-15
13:55
Fukui   Fabrication and measurement of FEA with a built-in electrostatic lens
Tomoya Tagami, Akifumi Koike, Yasuo Takagi (Shizuoka Univ.), Masayoshi Nagao, Tomoya Yoshida, Seigo Kanemaru (AIST), Yoichiro Neo, Toru Aoki, Hidenori Mimura (Shizuoka Univ.) ED2009-117
We have proposed the new applications by using a fine focusing crossover electron beam from FEA such as electron beam m... [more] ED2009-117
pp.7-10
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