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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 15 of 15  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2023-08-01
09:45
Hokkaido
(Primary: On-site, Secondary: Online)
Fabrication of SiC/AlN multilayer structure on 3°off-axis Si(110) substrate and graphene formation thereon
Ryosuke Saito, Yuki Nara, Daiki Kasai, Haruto Koriyama, Yoshiharu Enta, Hideki Nakazawa (Hirosaki Univ.) CPM2023-19
We have grown aluminum nitride (AlN) films on 3 ̊off-axis Si(110) substrates by pulsed laser deposition (PLD) and formed... [more] CPM2023-19
pp.29-32
CPM 2023-02-28
11:30
Tokyo Tokyo University of Technology
(Primary: On-site, Secondary: Online)
Photovoltaic properties of boron carbide thin films prepared by magnetron sputtering using hydrogen gas
Tatsuya Nishida, Masayoshi Sato, Yasuyuki Kobayashi, Yoshiharu Enta, Hideki Nakazawa (Hirosaki Univ.) CPM2022-94
 [more] CPM2022-94
pp.35-38
CPM 2022-08-04
16:15
Hokkaido   Hydrogen gas effects on the properties of boron carbide films prepared by magnetron sputtering
Nishida Tatsuya, Taniguchi Ryu, Masayoshi Sato, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki (Hirosaki Univ.), Hirokazu Fukidome (Touhoku Univ.), Hideki Nakazawa (Hirosaki Univ.) CPM2022-15
We have deposited amorphous boron carbide (B4C) films and hydrogenated amorphous B4C (B4C:H) films by RF magnetron sputt... [more] CPM2022-15
pp.14-17
CPM 2021-10-27
13:20
Online Online Effects of H2 and Ar dilution on the optical and electrical properties of Si and N doped diamond-like carbon films by plasma-enhanced chemical vapor deposition
Yuya Sasaki, Hiroya Osanai, Yusuke Ohtani, Yuta Murono, Masayoshi Sato, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki, Hideki Nakazawa (Hirosaki Univ.) CPM2021-26
We have deposited silicon and nitrogen doped diamond-like carbon (Si–N–DLC) films by radio frequency plasma-enhanced che... [more] CPM2021-26
pp.23-28
CPM 2020-10-29
15:10
Online Online Hydrogen effects on the properties of BCN films deposited by magnetron sputtering
Ryu Taniguchi, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta (Hirosaki Univ.), Hirokazu Fukidome (Tohoku Univ.), Hideki Nakazawa (Hirosaki Univ.) CPM2020-17
 [more] CPM2020-17
pp.23-26
CPM 2019-11-07
15:00
Fukui Fukui univ. Annealing effects on the properties of nitrogen doped DLC films
Hiroya Osanai, Kazuki Nakamura, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki (Hirosaki Univ.), Maki Suemitsu (Tohoku Univ.), Hideki Nakazawa (Hirosaki Univ.) CPM2019-46
We have prepared nitrogen doped diamond-like carbon (N-DLC) films by plasma-enhanced chemical vapor deposition using H2 ... [more] CPM2019-46
pp.9-14
CPM, IEE-MAG 2018-11-02
14:25
Niigata Machinaka campus Nagaoka Thermal stability of silicon and nitrogen doped DLC thin films
Hideki Nakazawa, Kazuki Nakamura, Hiroya Osanai, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki (Hirosaki Univ.), Maki Suemitsu (Tohoku Univ.) CPM2018-52
We have investigated the effects of post-annealing on the properties of silicon and nitrogen doped diamond-like carbon (... [more] CPM2018-52
pp.99-104
CPM 2018-08-09
14:30
Aomori Hirosaki Univ. Effects of nitrogen doping on the properties of Si-doped DLC films
Kazuki Nakamura, Haruka Oohashi (Hirosaki Univ.), Tai Yokoyama, Kei-ichiro Tajima, Norihumi Endo, Maki Suemitsu (Tohoku Univ.), Yoshiharu Enta, Yasuyuki Kobayashi, Yushi Suzuki, Hideki Nakazawa (Hirosaki Univ.) CPM2018-8
We have investigated the effects of nitrogen (N) doping on the chemical bonding states and the electrical, optical, and ... [more] CPM2018-8
pp.1-6
CPM 2018-08-09
14:50
Aomori Hirosaki Univ. Growth of graphene on SiC/AlN/Si(110) substrates
Hideki Nakazawa, Syunki Narita, Yuki Nara, Yoshiharu Enta (Hirosaki Univ.) CPM2018-9
We have grown aluminum nitride (AlN) films on 3º off-axis Si(110) substrates by pulsed laser deposition (PLD), and inves... [more] CPM2018-9
pp.7-12
CPM 2018-08-10
11:05
Aomori Hirosaki Univ. Reduction reaction of SiO2 layer on Si substrate by irradiation of electron beam
Keisuke Fujimori, Yosuke Chida, Yusuke Masuda, Natsuki Ujiie, Yoshiharu Enta (Hirosaki Univ.) CPM2018-18
Irradiation effects of electron beam on 20-100-nm-thick SiO_{2} layer on Si(100) have been investigated by scanning elec... [more] CPM2018-18
pp.47-52
CPM 2018-08-10
11:25
Aomori Hirosaki Univ. Surface composition and chemical bond structure of Zr-based metallic glass
Haruto Koriyama, Keisuke Fujimori, Yoshiharu Enta (Hirosaki Univ.), Nozomu Togashi (Adamant Namiki Precision Jewel) CPM2018-19
It has been reported that the Zr-based bulk metallic glass alloy commonly known as Vit 105 (Zr_{52.5}Cu_{17.9}Ni_{14.6}A... [more] CPM2018-19
pp.53-56
CPM 2015-08-10
13:40
Aomori   Effects of substrate bias on properties of nitrogen-doped DLC films prepared by radio frequency plasma-enhanced chemical vapor deposition
Masato Tsuchiya, Kazuki Murakami, Tatsuhito Satou, Takahiro Takami, Yoshiharu Enta, Hideki Nakazawa (Hirosaki Univ.) CPM2015-32
We have deposited nitrogen-doped diamond-like carbon (N-DLC) films by RF plasma-enhanced chemical vapor deposition using... [more] CPM2015-32
pp.7-10
CPM 2015-08-11
11:40
Aomori   Effect of surface adsorbate on chemical shifts of core-level spectra for silicon oxinitride film
Takahiro Takami, Makoto Wada, Yoshiharu Enta (Hirosaki Univ.) CPM2015-45
For silicon oxynitride (SiON) layers formed under specific conditions, unusual core-level spectra, which have large chem... [more] CPM2015-45
pp.71-74
CPM 2011-08-11
09:50
Aomori   Uneven thermal decomposition of silicon oxide layer
Yoshiharu Enta, Kano Ogawa, Takayuki Nagai (Hirosaki Univ.) CPM2011-68
We have investigated the thermal decomposition of 20nm-thickness silicon oxide on Si(100) at a temperature of 1100º... [more] CPM2011-68
pp.61-64
CPM 2009-08-10
16:30
Aomori Hirosaki Univ. Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation
Ryoichi Osozawa, Hideki Nakazawa, Tomohide Okuzaki, Naoyuki Satoh, Yoshiharu Enta (Hirosaki Univ.), Maki Suemitsu (Tohoku Univ.) CPM2009-37
We have deposited diamond-like carbon (DLC) films on Si substrate by pulsed laser deposition using KrF excimer laser, an... [more] CPM2009-37
pp.19-24
 Results 1 - 15 of 15  /   
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