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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2022-02-04
09:05
Online Online [Invited Talk] Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films using lag-time method
Takeshi Momose, Taewoong Kim, Yubin Deng, Momoko Deura (UTokyo), Akira Matsuo, Nobuo Yamaguchi (CANON ANELVA), Yukihiro Shimogaki (UTokyo) SDM2021-74
For the development of ultra-thin barrier layers for Cu interconnections in ultra large scale integration, it is essenti... [more] SDM2021-74
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