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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2008-10-30
14:30
Niigata Niigata Univ. Lowering the resistivity of Al dope ZnO films deposited by a magnetron sputtering with a third electrode
Yutaka Oshima, Yuichiro Makino (nagaoka Univ. of Tech.), Hironori Katagiri, Kazuo Jinbo (Nagaoka National College of Tech,), Yuichiro Kuroki, Kanji Yasui, Masasuke Takata, Tadashi Akahane (nagaoka Univ. of Tech.) CPM2008-78
Improvement of the uniformity in the resistivity of Al doped ZnO (AZO) films has been obtained using a radio frequency (... [more] CPM2008-78
pp.19-22
CPM 2007-11-17
09:50
Niigata Nagaoka University of Technology Preparation SiC/SOI structure substrate using Hot-Mesh CVD technique,and dependence of top Si layer thickness
Yuichiro Makino, Hitoshi Miura, Hiroshi Nishiyama, Kanji Yasui, Masasuke Takata, Yasunobu Inoue, Tadashi Akahane (Nagaoka Univ. of Tech.) CPM2007-117
Epitaxial growth of 3C-SiC films on SOI substrates was investigated by hot-mesh (HM-) CVD method using monomethylsilane ... [more] CPM2007-117
pp.65-68
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