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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2015-11-07
11:50		 Niigata Machinaka Campus Nagaoka High-energy H2O beam produced by a Pt-catalyzed H2 - O2 reaction for the metal oxide film deposition
Yusuke Teraguchi, Ryoichi Tajima, Tomoki Nakamura, Kazumasa Takahashi, Yasuhiro Tamayama, Kanji Yasui (Nagaoka Univ. Technol.) CPM2015-100		 De Laval nozzle structure in a CVD apparatus using a high-energy H2O produced by a Pt-catalyzed H2 and O2 reaction, mean... [more] CPM2015-100
pp.75-79
EMD, CPM, OME 2015-06-19
15:20		 Tokyo Kikai-Shinko-Kaikan Bldg. Dependence of H2O beam condition produced by a Pt-catalyzed H2-O2reaction on the opening angle of Laval nozzle
Yusuke Teraguchi, Ryoichi Tajima, Tomoki Nakamura, Kazumasa Takahashi, Yasuhiro Tamayama, Kanji Yasui (Nagaoka Univ. Technol) EMD2015-16 CPM2015-26 OME2015-29		 Nozzle structure in a CVD apparatus using a high-energy H2O produced by a Pt-catalyzed H2 and O2 reaction was examined. ... [more] EMD2015-16 CPM2015-26 OME2015-29
pp.29-34
CPM 2014-09-05
09:30		 Yamagata The 100th Anniversary Hall, Yamagata University Growth of nonpolar GaN films by low-pressure chemical vapor deposition and their properties
Yusuke Teraguchi, Yuusuke Miyake, Tomoya Nishiyama (Nagaoka Univ. Technol.), Koichiro Oishi, Hironori Katagiri (Nagaoka Nat. Coll. Technol.), Yasuhiro Tamayama, Kanji Yasui (Nagaoka Univ. Technol.) CPM2014-83		 No-polar GaN films were grown on r-planesapphire substrates using low pressure chemical vapor depsition. The GaN fiilms ... [more] CPM2014-83
pp.43-47
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